Two-surface-plasmon-polariton-absorption based lithography using 400 nm femtosecond laser
Author:
Funder
NNSFC
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4866870
Reference19 articles.
1. Plasmonics: Fundamentals and Applications
2. Effect of metals on UV-excited plasmonic lithography for sub-50 nm periodic feature fabrication
3. Large-area surface-plasmon polariton interference lithography
4. Surface Plasmon Interference Nanolithography
5. Surface plasmon resonant interference nanolithography technique
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