Surface plasmon resonant interference nanolithography technique
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1760221
Reference17 articles.
1. Light-coupling masks for lensless, sub-wavelength optical lithography
2. Patterning 100 nm features using deep-ultraviolet contact photolithography
3. Patterning Sub-50 nm features with near-field embedded-amplitude masks
4. Energy flow in light-coupling masks for lensless optical lithography
5. Metal nanoparticle arrays for near-field optical lithography
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