Mapping of local stress distributions in SiGe/Si optical channel waveguide
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1376420
Reference17 articles.
1. Introduction to the Issue on Silicon-Based Optoelectronics
2. Characteristics of photoelastic waveguides in SiGe/Si heterostructures
3. Process‐induced mechanical stress in isolation structures studied by micro‐Raman spectroscopy
4. Micro‐Raman study of stress distribution in local isolation structures and correlation with transmission electron microscopy
5. Film‐edge‐induced stress in substrates
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