The role of proximity caps during the annealing of UV-ozone oxidized GaAs
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2740359
Reference23 articles.
1. Thermally induced oxide crystallinity and interface destruction in Ga2O3–GaAs structures
2. X-ray photoelectron spectroscopic study of the formation of catalytic gold nanoparticles on ultraviolet-ozone oxidized GaAs(100) substrates
3. The formation of supported monodisperse Au nanoparticles by UV/ozone oxidation process
4. Halogen lamp annealing of GaAs for MESFET fabrication
5. Infrared rapid thermal annealing for GaAs device fabrication
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