Ellipsometry investigation of the amorphous-to-microcrystalline transition in a-Si:H under hydrogen-plasma treatment
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3393273
Reference51 articles.
1. Trap-limited hydrogen diffusion ina-Si:H
2. The post-hydrogenation of low-pressure chemical vapor deposited amorphous silicon
3. Hydrogenation kinetics and defect termination of post‐plasma‐treated chemical‐vapor‐deposited amorphous silicon film
4. Hydrogen migration in polycrystalline silicon
5. Hydrogen transport in amorphous silicon
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