Fundamental piezoresistive coefficients of p-type single crystalline 3C-SiC
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4869151
Reference24 articles.
1. Silicon carbide MEMS for harsh environments
2. Piezoresistive Effect of p-Type Single Crystalline 3C-SiC Thin Film
3. Noise and frequency analyses of a miniaturized 3-DOF accelerometer utilizing silicon nanowire piezoresistors
4. Micro/nano-mechanical sensors and actuators based on SOI-MEMS technology
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