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Micro/nano-mechanical sensors and actuators based on SOI-MEMS technology

  • Published:2010-03-01 Issue:1 Volume:1 Page:013001
  • ISSN:2043-6254
  • Container-title:Advances in Natural Sciences: Nanoscience and Nanotechnology
  • language:
  • Short-container-title:Adv. Nat. Sci: Nanosci. Nanotechnol.

Author:

Dao Dzung Viet,Nakamura Koichi,Bui Tung Thanh,Sugiyama Susumu

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,General Materials Science

Cited by 29 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Silicon nanowire piezoresistor and its applications: a review;Nanotechnology;2024-06-20

2. Design and Manufacture of a MEMS Capacitive Differential Pressure Sensor with High Linearity and Low Sensitivity;2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS);2024-05-02

3. Classified Volatile Organic Compound Detection using Data Classification Algorithms;Engineering, Technology & Applied Science Research;2024-02-08

4. Numerical Simulation of Highly Sensitive Ga2O3 Pressure Sensor;physica status solidi (a);2024-01

5. Enhancing Sensitivity and Selectivity: Morphological Modification and Chemical Functionalization within Confined Structures;International Journal of Precision Engineering and Manufacturing;2023-12-18
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