Establishment and experimental verification of the photoresist model considering interface slip between photoresist and concave spherical substrate
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://scitation.aip.org/deliver/fulltext/aip/journal/adva/5/7/1.4926343.pdf?itemId=/content/aip/journal/adva/5/7/10.1063/1.4926343&mimeType=pdf&containerItemId=content/aip/journal/adva
Reference25 articles.
1. Dynamic mechanical properties of photo resist thin films
2. Structural and composition investigations at delayered locations of low k integrated circuit device by gas-assisted focused ion beam
3. Dynamic measurements of film thickness over local topography in spin coating
4. Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers
5. Spin coating over topography
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