Dynamic mechanical properties of photo resist thin films
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials
Link
http://link.springer.com/content/pdf/10.1007/BF03177403.pdf
Reference11 articles.
1. V. Seidemann, S. Butefisch, S. Buttegenbach, Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers,Sensors and Actuators A. 97 (2002) 457–461.
2. L. Klinger, E. Rabkin, Theory of nanoindentation creep controlled by interfacial diffusion,Scripta Materialia. 48 (2003) 1475–1481.
3. B.D. Beake and G.J. Leggett, Nanoindentation and nanoscratch testing of uniaxially and biaxially drawn poly(ethylene terephthalate) film,Polymer. 43 (2002) 319–327.
4. Y. Yin, S.F. Ling, Y. Liu, A dynamic indentation method for characterizing soft incompressible viscoelastic materials, Materials Science and Engineering A. 379 (2004) 334–340.
5. V. Gonda, K.M.B. Jansen, L.J. Ernst, J. den Toonder, G.Q. Zhang, Micro-mechanical testing of SiLK by nanoindentation and substrate curvature techniques,Microelectronics Reliability. 47 (2007) 248–251.
Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. A comprehensive micro-nano investigative approach to study the development of aluminosilicate gel in binary blends of lithium slag geopolymer;Cement and Concrete Composites;2024-01
2. Spin-speed independent thickness and molecular adsorption behaviour of polyelectrolyte multilayers;The European Physical Journal Applied Physics;2021-02
3. A novel evaluation of shock absorption and adhesive strength under shear impact loading;The Journal of Adhesion;2020-08-13
4. Mechanical Properties of Microposit S1813 Thin Layers;Modeling, Synthesis and Fracture of Advanced Materials for Industrial and Medical Applications;2020
5. Step height measurement of microscale thermoplastic polymer specimens using contact stylus profilometry;Precision Engineering;2016-07
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3