Nano-micro Processing of Epoxy Resin Systems by Ion Beam Lithography with Multiple Energies and Species
Author:
Affiliation:
1. Japan Atomic Energy Agency
2. Shibaura Institute of Technology
3. Osaka University
Publisher
The Materials Research Society of Japan
Link
https://www.jstage.jst.go.jp/article/tmrsj/36/3/36_305/_pdf
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