Fabrication of Concave and Convex Structure Array Consisted of Epoxy Long-Nanowires by Light and Heavy Ion Beams Lithography-Reference-Cited by-同舟云学术

Fabrication of Concave and Convex Structure Array Consisted of Epoxy Long-Nanowires by Light and Heavy Ion Beams Lithography

Published:2012 Issue:2 Volume:37 Page:237-240
ISSN:1382-3469
Container-title:Transactions of the Materials Research Society of Japan
language:en
Short-container-title:Trans. Mat. Res. Soc. Japan

Author:

Takano Katsuyoshi¹,Sugimoto Masaki²,Asano Atsushi¹,Maeyoshi Yuta¹,Marui Hiromi¹,Omichi Masaaki¹,Saeki Akinori¹,Seki Shu¹,Satoh Takahiro³,Ishii Yasuyuki³,Kamiya Tomihiro³,Ohkubo Takeru³,Koka Masashi³,Nishikawa Hiroyuki⁴

Affiliation:

1. Division of Applied Chemistry, Graduate School of Engineering, Osaka University

2. Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency

3. Quantum Beam Science Directorate, Japan Atomic Energy Agency

4. Department of Electrical Engineering, Shibaura Institute of Technology

Publisher

The Materials Research Society of Japan

Link

https://www.jstage.jst.go.jp/article/tmrsj/37/2/37_237/_pdf

Reference21 articles.

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3. [3] J.A. van Kan, J.L. Sanchez, B. Xu, T. Osipowicz, F. Watt: Nucl. Instr. and Meth. B 148, 1085-89 (1999).

4. [4] T. C. Sum, A. A. Bettiol, J. A. van Kan, F. Watt, E. Y. B. Pun and K. K. Tung, Appl. Phys. Lett. 83, 1707-09 (2003).

5. [5] F. Menzel, D. Spemann, S. Petriconi, J. Lenzner, T. Butz, Nucl. Instr. and Meth. B 260, 419-425 (2007).

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