Subject
General Chemical Engineering,General Chemistry
Cited by
4 articles.
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1. Dry Patterning of Al and Al Alloys;Crystal Research and Technology;1986-03
2. Electrical characterization of rf glow discharges using an operating impedance bridge;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1985-05
3. Plasma‐enhanced CVD: Oxides, nitrides, transition metals, and transition metal silicides;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1984-04
4. Dry Etching for VLSI—A Review;Journal of The Electrochemical Society;1982-03-01