Author:
Sameith D.,Tiller H.-J.,Breitbarth F.-W.
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Reference13 articles.
1. : Thermochemical properties of inorganic substances, Berlin—Heidelberg—New York 1973
2. : 5th Int. Symp. Plasma Chemistry Edinburgh 1981, Symp. Proc. Vol. 1, 318
3. : Gmelins-Handbuch d. anorgan. Chemie, 8. Aufl., System Nr. 35, Aluminium, Teil B, Weinheim—Berlin 1959
4. Carbon tetrachloride plasma etching of GaAs and InP: A kinetic study utilizing nonperturbative optical techniques
5. Plasma etch chemistry of aluminum and aluminum alloy films
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献