Electrical characterization of rf glow discharges using an operating impedance bridge
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.572979
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3. Electrical characterization of radio‐frequency discharges in the Gaseous Electronics Conference Reference Cell;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1992-11
4. Analysis of large‐area beam attacks on surfaces and testing of etching reactions;Review of Scientific Instruments;1992-01
5. Characterization of a radio frequency glow discharge emission source;Spectrochimica Acta Part B: Atomic Spectroscopy;1991-01
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