Analysis of large‐area beam attacks on surfaces and testing of etching reactions
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1142741
Reference31 articles.
1. Ion Energies at the Cathode of a Glow Discharge
2. Mass-spectrometric ion sampling from reactive plasmas I. Apparatus for argon and reactive discharges
3. Ion and electron energy analysis at a surface in an RF discharge
4. A System for Determining the Mass and Energy of Particles Incident on a Substrate in a Planar Diode Sputtering System
5. The energy distribution of ions bombarding electrode surfaces in rf plasma reactors
Cited by 19 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Ion angle distribution measurement with a planar retarding field analyzer;Review of Scientific Instruments;2015-11
2. Surface and Thin Film Analysis;Nonthermal Plasma Chemistry and Physics;2012-11-13
3. Plasma Diagnostics for Unraveling Process Chemistry;Annual Review of Analytical Chemistry;2008-07-01
4. Overview of Plasma Diagnostic Techniques;Handbook of Advanced Plasma Processing Techniques;2000
5. Compact floating ion energy analyzer for measuring energy distributions of ions bombarding radio-frequency biased electrode surfaces;Review of Scientific Instruments;1999-06
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3