Author:
Zoeteweij M. L.,van der Donck J. C. J.,Versluis R.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,General Chemistry
Reference11 articles.
1. Schmitz, P. and Cardot, J. 2002.Particles on Surfaces 7: Detection, Adhesion and Removal, Edited by: Mittal, K. L. 189–196. Utrecht: VSP.
2. Busnaina, A. A. and Lin, H. 2002.Proc. IEEE International Symposium on Semiconductor Manufacturing Conference272–277.
3. The removal of deformed submicron particles from silicon wafers by spin rinse and megasonics
4. Adhesion and Removal of Particles from Surfaces Under Humidity Controlled Air Stream
Cited by
31 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献