Capability and efficiency of droplets in removing nanoparticle contaminants from Si wafer via high-speed microdroplet impaction-Reference-Cited by-同舟云学术

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Capability and efficiency of droplets in removing nanoparticle contaminants from Si wafer via high-speed microdroplet impaction

Published:2024-04-16 Issue:9 Volume:58 Page:1008-1023
ISSN:0278-6826
Container-title:Aerosol Science and Technology
language:en
Short-container-title:Aerosol Science and Technology

Author:

Park Jinhyo¹,Lee Seungwook¹,Kim Jeonggeon¹,Lee Donggeun¹

Affiliation:

1. School of Mechanical Engineering, Pusan National University, Busan, South Korea

Funder

National Research Foundation of Korea

Korea Institute of Energy Technology Evaluation and Planning

Korea government

Graduate School of Convergence for Clean Energy Integrated Power Generation

Publisher

Informa UK Limited

Link

https://www.tandfonline.com/doi/pdf/10.1080/02786826.2024.2338523

Reference43 articles.

1. Hamaker constants of inorganic materials

2. Hydrodynamic particle removal from surfaces

3. Removal of nano-sized surface particles by CO2 gas cluster collisions for dry cleaning

4. Maximum spreading of liquid drop on various substrates with different wettabilities

5. Effect of contact deformations on the adhesion of particles

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