Three-DOF Electrostatic Induction Actuator Providing Translational and Rotational Surface-Drive Motion

Abstract

This paper describes the driving characteristics of a three degree-of-freedom (three-DOF) electrostatic induction actuator, which can demonstrate surface-drive characteristics with translational and rotational motions. It consists of a sheet-type slider without electrodes and a planar stator with an array of three-phase driving electrodes. The electrodes with different orientations are aligned in a regular manner to construct a four-by-four checkerboard pattern. Controlling applied voltage patterns can generate translational or rotational patterns of electrostatic fields, which drive the slider. The performance of the three-DOF actuator with regards to translational and rotational motion was investigated.