Author:
Torii Akihiro, ,Mitsuyoshi Yuta,Mototani Suguru,Doki Kae
Abstract
The orientation compensation of a three-degrees-of-freedom inchworm stage with optical navigation is described. As the stage does not use any guide or preload, a closed loop feedback control system is employed to retain the accurate orientation of the stage. The stage consists of piezoelectric actuators (piezos) for thrusting and electromagnets for positioning. A non-excited electromagnet is moved by the deformation of piezos, and excited electromagnets retain their positions. However, a weak electromagnetic force prevents the stage from retaining its accurate position. In addition, a friction force reduces the displacement of the non-excited electromagnet. Therefore, the orientation of the stage is measured using a light source and an optical detector, and the deformation of the piezos is controlled. The orientation error is reduced by using optical navigation.
Publisher
Fuji Technology Press Ltd.
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Cited by
1 articles.
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