CMOS-compatible dense arrays of Ge quantum dots on the Si(001) surface: hut cluster nucleation, atomic structure and array life cycle during UHV MBE growth

Author:

Arapkina Larisa V,Yuryev Vladimir A

Publisher

Springer Science and Business Media LLC

Subject

Condensed Matter Physics,General Materials Science

Reference45 articles.

1. Yuryev VA, Arapkina LV, Chapnin VA, Kalinushkin VP, Kiryanova NV, Uvarov OV, Chizh KV, Krylova LA, Stepanov RO, Zaytsev OO: Development of physical and technological basis of the controllable formation of densely packed Ge nanocluster arrays on the silicon (100) surface by means of ultrahigh vacuum molecular beam epitaxy. Report on Research Project 2007–3-1.3–25–01–303 of the Science and Innovations Agency of the Russian Federation, A. M. Prokhorov General Physics Institute of the Russian Academy of Sciences, Moscow, Russia 2007. [State Reg. No. 0220.0 802501 (VNITC)] [State Reg. No. 0220.0 802501 (VNITC)]

2. Pchelyakov OP, Bolkhovitjanov YB, Dvurechenskiĭ AV, Sokolov LV, Nikiforov AI, Yakimov AI, Voigtländer B: Silicon-germanium nanostructures with quantum dots: Formation mechanisms and electrical properties. Semicond 2000, 34: 1229. 10.1134/1.1325416

3. Wang KL, Tong S, Kim HJ: Properties and applications of SiGe nanodots. Materials Science in Semiconductor Processing 2005, 8: 389. 10.1016/j.mssp.2004.09.134

4. Smagina JV, Zinovyev VA, Nenashev AV, Dvurechenskiĭ AV, Armbrister VA, Teys SA: Self-assembly of germanium islands under pulsed irradiation by a low-energy ion beam during heteroepitaxy of Ge/Si(100) structures. JETP 2008, 106: 517. 10.1134/S1063776108030114

5. Wang KL, Cha D, Liu J, Chen C: Ge/Si self-assembled quantum dots and their optoelectronic device applications. Proc of the IEEE 2007, 95(9):1866. 10.1109/JPROC.2007.900971

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