Effect of crystal plane orientation on the friction-induced nanofabrication on monocrystalline silicon
Author:
Publisher
Springer Science and Business Media LLC
Subject
Condensed Matter Physics,General Materials Science
Link
http://link.springer.com/content/pdf/10.1186/1556-276X-8-137.pdf
Reference24 articles.
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2. Ko WH: Trends and frontiers of MEMS. Sens Actuators A 2007, 136: 62–67. 10.1016/j.sna.2007.02.001
3. Cui Z: Micro-nanofabrication Technologies and Applications. Beijing: Higher Education Press; 2008.
4. Lin BJ: Optical lithography - present and future challenges. Comptes Rendus Physique 2006, 7(8):858–874. 10.1016/j.crhy.2006.10.005
5. Cerofolini G (Ed): Nanoscale Devices: Fabrication, Functionalization, and Accessibility from the Macroscopic World. Heidelberg: Springer; 2009.
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