Author:
Li Jie,Guo Hao,Liu Jun,Tang Jun,Ni Haiqiao,Shi Yunbo,Xue Chenyang,Niu Zhichuan,Zhang Wendong,Li Mifeng,Yu Ying
Abstract
Abstract
As a highly sensitive strain gauge element, GaAs-based resonant tunneling diode (RTD) has already been applied in microelectromechanical system (MEMS) sensors. Due to poor mechanical properties and high cost, GaAs-based material has been limited in applications as the substrate for MEMS. In this work, we present a method to fabricate the GaAs-based RTD on Si substrate. From the experimental results, it can be concluded that the piezoresistive coefficient achieved with this method reached 3.42 × 10−9 m2/N, which is about an order of magnitude higher than the Si-based semiconductor piezoresistors.
Publisher
Springer Science and Business Media LLC
Subject
Condensed Matter Physics,General Materials Science
Cited by
12 articles.
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