Photolithography of SU-8 microtowers for a 100-turn, 3-D toroidal microinductor
Author:
Funder
Korea Institute for Advancement of Technology
Publisher
Springer Science and Business Media LLC
Subject
Biomedical Engineering,Biomaterials
Link
http://link.springer.com/content/pdf/10.1186/s40486-018-0076-z.pdf
Reference24 articles.
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2. Aekbote BL, Fekete T, Jacak J, Vizsnyiczai G, Ormos P, Kelemen L (2016) Surface-modified complex SU-8 microstructures for indirect optical manipulation of single cells. Biomed Opt Exp 7:45–56
3. Xie X, Livermore C (2016) A pivot-hinged, multilayer SU-8 micro motion amplifier assembled by a self-aligned approach. In: 2016 IEEE 29th international conference on micro electro mechanical systems (MEMS), Shanghai, China, 24–28 Jan. 2016, pp 75–78
4. Dhakar L, Tay FEH, Lee C (2015) Development of a broadband triboelectric energy harvester with SU-8 micropillars. J Microelectromech Syst 24(1):91–99
5. Ghalichechian N, Sertel K (2015) Permittivity and loss characterization of SU-8 films for mm W and terahertz applications. IEEE Antennas Wirel Propag Lett 14:723–726
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