Spectral composition of low-coherence interferograms at high numerical apertures
Author:
Funder
Deutsche Forschungsgemeinschaft
Publisher
Springer Science and Business Media LLC
Subject
Atomic and Molecular Physics, and Optics
Link
http://link.springer.com/content/pdf/10.1186/s41476-019-0101-8.pdf
Reference23 articles.
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3. Caber, P.J.: Interferometric profiler for rough surfaces. Appl. Opt. 32, 3438–3441 (1993). https://doi.org/10.1364/AO.32.003438
4. Malacara, D.: Optical Shop Testing. Wiley, Hoboken, New Jersey, USA (2007)
5. de Groot, P.: Principles of interference microscopy for the measurement of surface topography. Adv. Opt. Photon. 7, 1–65 (2015). https://doi.org/10.1364/AOP.7.000001
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