Interferometric profiler for rough surfaces-Reference-Cited by-同舟云学术

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Interferometric profiler for rough surfaces

Published:1993-07-01 Issue:19 Volume:32 Page:3438
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Caber Paul J.

Publisher

The Optical Society

Reference3 articles.

1. Multiple-wavelength phase-shifting interferometry

2. Mirau correlation microscope

3. Profilometry with a coherence scanning microscope

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