Lateral Resolution of Imaging Surface-Analytical Instruments as SIMS, AES and XPS: Application of the BAM-L200 Certified Reference Material and Related ISO Standards-Reference-Cited by-同舟云学术

Lateral Resolution of Imaging Surface-Analytical Instruments as SIMS, AES and XPS: Application of the BAM-L200 Certified Reference Material and Related ISO Standards

Published:2017 Issue:2 Volume:24 Page:123-128
ISSN:1341-1756
Container-title:Journal of Surface Analysis
language:en
Short-container-title:JSA

Author:

Unger W. E. S.¹,Senoner M.¹,Wirth Th.¹,Bütefisch S.²,Busch I.²

Affiliation:

1. Bundesanstalt für Materialforschung und –prüfung (BAM)

2. Physikalisch-Technische Bundesanstalt (PTB)

Publisher

Surface Analysis Society of Japan

Link

https://www.jstage.jst.go.jp/article/jsa/24/2/24_123/_pdf

Reference11 articles.

1. [1] ISO 18516:2006, Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Determination of lateral resolution, ISO, Geneva, Switzerland, (2006).

2. [2] Y. G. Li, S. F. Mao, and Z. J. Ding, in Applications of Monte Carlo Method in Science and Engineering, ed. by S. Mordechai, Intech (2011). DOI: 10.5772/16171

3. [3] H. Ito, M.Ito, Y. Magatani, and F. Soeda, Appl. Surf. Sci. 100/101, 152 (1996).

4. [4] ISO/TR 19319:2013, Surface chemical analysis -- Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods, ISO, Geneva, Switzerland, (2013).

5. [5] E. Abbe, Beiträge zur Theorie des Mikroskops und der mikroskopischen Wahrnehmung, in: Archiv für mikroskopische Anatomie, Vol. 9, Max Cohen & Sohn, Bonn, 413 (1873).

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