Modeling reactive magnetron sputtering: a survey of different modeling approaches

Author:

Madarász Rossi Róbert1,Kelemen András2,Kádár Péter3

Affiliation:

1. Doctoral School of Applied Informatics and Applied Mathematics , Óbuda University Budapest , Hungary

2. Sapientia Hungarian University of Transylvania , Cluj-Napoca , Romania

3. Óbuda University , Budapest , Hungary

Abstract

Abstract The paper focuses on providing an insight into the current state of computational modeling regarding reactive magnetron sputtering systems. A detailed compilation of developed models is gathered and grouped into categories based on the phenomena being modeled. The survey covers models developed for the analysis of magnetron discharges, particle-surface interactions at the target and the substrate, as well as macroscopic models. Corresponding software packages available online are also presented. After gaining the necessary insight into the current state of research, a list of the most challenging tasks is given, comparing diffierent approaches, that have been used to combat the encountered difficulties. The challenges associated with modeling tasks range from analytical complexity, mathematical know-how used for model approximation and reduction, as well as optimization between computational load and result accuracy. As a conclusion, the future challenges are compiled into a list and a probable direction in modeling is given, that is likely to be further pursued.

Publisher

Walter de Gruyter GmbH

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. A fluid model of pulsed direct current planar magnetron discharge;Scientific Reports;2023-06-03

2. Modeling of Reactive Sputtering—History and Development;Materials;2023-04-20

3. A Fluid Model of Pulsed Direct Current Planar Magnetron Discharge;2023-04-03

4. Reactive magnetron sputtering: an offline parameter identification method;2021 IEEE 15th International Symposium on Applied Computational Intelligence and Informatics (SACI);2021-05-19

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