Vacuum microdevices

Author:

Grzebyk T.,Górecka-Drzazga A.

Publisher

Walter de Gruyter GmbH

Subject

Artificial Intelligence,Computer Networks and Communications,General Engineering,Information Systems,Atomic and Molecular Physics, and Optics

Reference12 articles.

1. Vabond Project, "Long-term stability of vacuum-encapsulated MEMS devices using eutectic wafer bonding" http://www.ist-world.org

2. Polysilicon vibrating gyroscope vacuum-encapsulated in an on-chip micro chamber;T. Tsuchiya;Sensors and Actuators A,2003

3. Study of porous silicon, silicon carbide and DLC coated field emitters for pressure sensor application;I. Kleps;Solid-State Electronics,2001

4. MEMS ultra low leak detection methods: a review;S. Miller;Sensor Review,2009

5. A microfabrication process for a vacuum-encapsulated microchamber;S. Randolph;Microelectronic Engineering,2005

Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Characterization of the ionization process inside a miniature glow-discharge micropump;B POL ACAD SCI-TECH;2018

2. MEMS tandem ion-sorption micropump;Journal of Micromechanics and Microengineering;2017-11-16

3. Improved properties of the MEMS-type ion-sorption micropump;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2017-11

4. Pressure-Driven Gas Flow through Nano-Channels at High Knudsen Numbers;Journal of Nano Research;2017-11

5. Miniature X-Ray Sources;Journal of Microelectromechanical Systems;2017-02

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