Author:
Millar Suzanne,Desmulliez Marc
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering
Reference9 articles.
1. de Coster, J., Jourdain, A., Puers, R. and Tilmans, H.A.C. (2005), “A method to evaluate internal cavity pressure of sealed MEMS devices”,Proceedings of the 15th European Microelctronics and Packaging Conference EMPC 2005, 12‐15 June, Brugge.
2. Hermeticity Testing and Failure Analysis of MEMS Packages
3. Electric field breakdown at micrometre separations in air and nitrogen at atmospheric pressure
4. Elger, G., Shiv, L., Kikac, N., Muller, F., Liebe, R., Grigat, M. and Heschel, M. (2004), “Optical leak detection for wafer level hermeticity testing”,IEEE Semiconductor International Electronics Manufacturing Technology Symposium, San Jose, CA, 14‐15 July.
5. Gueissaz, F. (2005), “Ultra low leak detection method for MEMS devices”,Proceedings of the 18th IEEE Internation Conference on MEMS, Miami Beach, FL.
Cited by
30 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献