Funder
National Natural Science Foundation of China
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference24 articles.
1. Recommended practices for the calibration and use of leaks;Ehrlich;J. Vac. Sci. & Technol. A Vac. Surf. & Films,1992
2. A precision gas flowmeter for vacuum metrology;Jousten;Vacuum,1993
3. Generation of Precise Micro Gas Flows by a Constant Pressure Flowmeter;Arai,2006
4. A new automated gas flowmeter developed by LIP;Cheng;Mapan,2007
5. Leak detection, calibrations and reference flows: practical example;Calcatelli;Vacuum,2007
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献