Author:
Rogov A. V.,Kapustin Yu. V.,Martynenko Yu. V.
Subject
Physics and Astronomy (miscellaneous)
Reference12 articles.
1. B. S. Danilin, Application of Low-Temperature Plasma for Thin-Film Deposition (Energoatomizdat, Moscow, 1989).
2. http://www.angstromsciences.com
3. http://www.inficon.com
4. P. V. Kashtanov, B. M. Smirnov, and R. Khipper, Phys. Usp. 50, 455 (2007).
5. Jin-Hyo Booa, Min Jae Jungb, Heon Kyu Parkb, Kyung Hoon Namb, and Jeon G. Han, Surf. Coat. Technol. 188–189, 721 (2004).
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