Investigation of the Plasma-Chemical Synthesis of Thin Ga2O3 Films Doped with Zn in One Step in Plasma-Reference-Cited by-同舟云学术

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Investigation of the Plasma-Chemical Synthesis of Thin Ga2O3 Films Doped with Zn in One Step in Plasma

Published:2023-11-30 Issue:6 Volume:57 Page:509-514
ISSN:0018-1439
Container-title:High Energy Chemistry
language:en
Short-container-title:High Energy Chem

Author:

Mochalov L. A.,Kudryashov M. A.,Prokhorov I. O.,Vshivtsev M. A.,Kudryashova Yu. P.,Slapovskaya E. A.,Knyazev A.V.

Publisher

Pleiades Publishing Ltd

Subject

Physical and Theoretical Chemistry

Link

https://link.springer.com/content/pdf/10.1134/S0018143923060115.pdf

Reference21 articles.

1. Peelaers, H., Lyons, J.L., Varley, B., and van de Walle, C.G., APL Mater., 2019, vol. 7, p. 022519.

2. Wang, X.H., Zhang, F.B., Saito, K., Tanaka, T., Nishio, M., and Guo, Q.X., J. Phys. Chem. Solids, 2014, vol. 75, no. 11, p. 1201.

3. Skachkov, D. and Lambrecht, W.R.L., Appl. Phys. Lett., 2019, vol. 114, no. 20, p. 202102.

4. Pearton, S.J., et al., Appl. Phys. Rev., 2018, vol. 5, no. 1, p. 011301.

5. Higashiwaki, M. and Jessen, G.H., Appl. Phys. Lett., 2018, vol. 112, no. 6, p. 060401.

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Structural properties and Luminescence of PECVD-prepared β-Ga₂O₃⸳ZnO thin films;2024 24th International Conference on Transparent Optical Networks (ICTON);2024-07-14

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