Resolution of a scanning electron microscope: 1. Current state of the problem-Reference-Cited by-同舟云学术

Resolution of a scanning electron microscope: 1. Current state of the problem

Published:2013-05 Issue:3 Volume:7 Page:497-504
ISSN:1027-4510
Container-title:Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
language:en
Short-container-title:J. Synch. Investig.

Author:

Novikov Yu. A.

Publisher

Pleiades Publishing Ltd

Subject

Surfaces, Coatings and Films

Link

http://link.springer.com/content/pdf/10.1134/S1027451013030105.pdf

Reference22 articles.

1. International Technology Roadmap for Semiconductors, 2011 Edition. Metrology. (2011).

2. Yu. A. Novikov and I. Yu. Stekolin, In Problems of Linear Measurements of Microobjects in Nanometer and Submicron Ranges, Proc. IOFAN, Vol. 49 (Nauka, Moscow, 1995), p. 41, () [in Russian].

3. V. P. Gavrilenko, Yu. A. Novikov, A. V. Rakov, and P. A. Todua, Proc. SPIE 7405, 740504 (2009).

4. Yu. A. Novikov and A. V. Rakov, in Problems of Linear Measurements of Microobjects in Nanometer and Submicron Ranges, Proc. IOFAN, Vol. 49 (Nauka, Moscow, 1995), p. 81 [in Russian].

5. V. P. Gavrilenko, V. A. Kalnov, Yu. A. Novikov, A. A. Orlikovsky, A. V. Rakov, P. A. Todua, K. A. Valiev, and E. N. Zhikharev, Proc. SPIE 7272, 727227 (2009).

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