Subject
Surfaces, Coatings and Films
Reference37 articles.
1. L. Reimer, Scanning Electron Microscopy: Physics of Image Formation and Microanalysis (Springer, New York, 1998).
2. Critical Dimension Metrology and the Scanning Electron Microscope;M. T. Postek,2001
3. Yu. A. Novikov and A. V. Rakov, Meas. Tech. 42 (1), 20 (1999).
4. T. Hatsuzawa, K. Toyoda, and Y. Tanimura, Rev. Sci. Instrum. 61 (3), 975 (1990).
5. V. Gavrilenko, Yu. Novikov, A. Rakov, and P. Todua, Nanoindustriya, No. 4, 36 (2009). [in Russian]
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