Subject
Surfaces, Coatings and Films
Reference43 articles.
1. L. Reimer, Scanning Electron Microscopy. Physics of Image Formation and Microanalysis (Springer, Berlin, 1998).
2. H. M. Marchman, J. E. Griffith, J. Z. Y. Guo, J. Frackoviak, and G. K. Celler, J. Vac. Sci. Technol. 12 (6), 3585 (1994).
3. Yu. A. Novikov and A. V. Rakov, Russ. Microelectron. 25, 368 (1996).
4. Yu. A. Novikov and A. V. Rakov, Meas. Tech., 42, 20 (1999).
5. M. T. Postek and A. E. Vladar, in Handbook of Silicon Semiconductor Metrology, Ed. by A. C. Diebold (Marcel Dekker Inc., Basel–New York, 2001).
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献