Simulation of the Deposition of Thin-Film Materials Used in the Manufacturing of Devices with Miniaturized Circuits
Author:
Publisher
Pleiades Publishing Ltd
Subject
Surfaces, Coatings and Films
Link
https://link.springer.com/content/pdf/10.1134/S1027451022060283.pdf
Reference35 articles.
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3. A. Bouazza and A. Settaouti, Monte Carlo Methods Appl. 22, 149 (2016). https://doi.org/10.1515/mcma-2016-0106
4. A. Bouazza and A. Settaouti, Monte Carlo Methods Appl. 24, 215 (2018). https://doi.org/10.1515/mcma-2018-0019
5. A. Bouazza, International Journal of Thin Film Science and Technology 11, 225 (2022). https://doi.org/10.18576/ijtfst/110210
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