Thermodynamic analysis of the growth of germanium-containing films from Ge(C2H5)4 + hydrogen mixtures
Author:
Publisher
Pleiades Publishing Ltd
Subject
Materials Chemistry,Metals and Alloys,Inorganic Chemistry,General Chemical Engineering
Link
http://link.springer.com/content/pdf/10.1134/S0020168514020046.pdf
Reference21 articles.
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2. Hu, C.Q., Zhu, J.Q., Zheng, W.T., et al., Annealing effects on the bonding structures, optical and mechanical properties for radio frequency reactive sputtered germanium carbide films, Appl. Surf. Sci., 2009, vol. 255, no. 6, p. 3552.
3. Yangping Li, Zhengtang Liu, Hailong Zhao, et al., Infrared transmission properties of germanium carbon thin films deposited by reactive rf magnetron sputtering, Vacuum, 2009, vol. 83, no. 6, p. 965.
4. Wu, X., Zhang, W., Yan, L., and Luo, R., The deposition and optical properties of Ge1 − x Cx thin film and infrared multilayer antireflection coatings, Thin Solid Films, 2008, vol. 516, no. 10, p. 3189.
5. Szmidt, J., Gazicki-Lipman, M., Szymanowski, H., et al., Electrophysical properties of thin germanium/carbon layers produced on silicon using organometallic radio frequency plasma enhanced chemical vapor deposition process, Thin Solid Films, 2003, vol. 441, nos. 1–2, p. 192.
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