Zigzag structures obtained by anisotropic etching of macroporous silicon
Author:
Publisher
Pleiades Publishing Ltd
Subject
Physics and Astronomy (miscellaneous)
Link
http://link.springer.com/content/pdf/10.1134/S1063785013110175.pdf
Reference16 articles.
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3. G. Barillaro, P. Bruschi, A. Diligenti, and A. Nannini, Phys. Status Solidi C 2, 3198 (2005).
4. E. V. Astrova and G. V. Fedulova, J. Micromech. Microeng. 19, 095009 (2009).
5. T. Geppert, S. L. Schweizer, U. Gosele, and R. B. Wehrspohn, Appl. Phys. A 84, 237 (2006).
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