Fabrication of regular silicon microstructures by photo‐electrochemical etching of silicon
Author:
Affiliation:
1. Dipartimento di Ingegneria dell'Informazione, Università di Pisa, Via Caruso, 56122 Pisa, Italy
Publisher
Wiley
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssc.200461110
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