Processing of Macroporous Silicon
Author:
Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-319-71381-6_73
Reference73 articles.
1. Astrova EV, Voronkov VB, Grekhov IV, Naschekin AV, Tkachenko AG (2000) Deep diffusion doping of macroporous silicon. Phys Stat Sol (a) 182:145
2. Astrova EV, Korovin LI, Lang IG, Remenyuk AD, Shuman VB (2003) Optical transparency of macroporous silicon with through pores. Semiconductors 37:57–64
3. Astrova EV, Borovinskaya TN, Tolmachev VA, Perova TS (2004) Technique for patterning macroporous silicon and the fabrication of bars of 2D photonic crystals with vertical walls. Semiconductors 38:1088–1091
4. Astrova EV, Borovinskaya TN, Zamoryanskaya MV, Perova TS (2005a) Silica micro tubes formed during the patterning of oxidized macroporous silicon. Phys Stat Sol C 2:3213–3217
5. Astrova EV, Borovinskaya TN, Tolmachev VA, Perova TS, Moore RA (2005b) Stripes of 2D photonic crystal obtained from macroporous silicon. Opt Mater 27:827–830
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