Author:
Bachurin V. I.,Zhuravlev I. V.,Pukhov D. E.,Rudy A. S.,Simakin S. G.,Smirnova M. A.,Churilov A. B.
Subject
Surfaces, Coatings and Films
Reference26 articles.
1. L. Bruchhaus, P. Mazarov, L. Bischoff, et al., Appl. Phys. Rev. A 4 (1), 011302 (2017). https://doi.org/10.1063/1.4972262
2. A. Joshi-Imre and S. Bauerdick, J. Nanotechnol. 2014, 170415 (2014). https://doi.org/10.1155/2014/170415
3. Sputtering by Particle Bombardment.Vol 1, Ed. by R. Behrisch (Springer, New York, 1981).
4. Sputtering by Particle Bombardment.Vol 2, Ed. by R. Behrisch (Springer, New York, 1983).
5. N. I. Borgardt, A. V. Rumyantsev, R. L. Volkov, et al., Mater. Res. Express 5 (2), 025905 (2018). https://doi.org/10.1088/2053-1591/aaace1