Comparison of technologies for nano device prototyping with a special focus on ion beams: A review

Author:

Bruchhaus L.1ORCID,Mazarov P.1,Bischoff L.2ORCID,Gierak J.3,Wieck A. D.4ORCID,Hövel H.5

Affiliation:

1. Raith GmbH, Konrad-Adenauer-Allee 8, 44263 Dortmund, Germany

2. Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstrasse 400, 01328 Dresden, Germany

3. Centre de Nanosciences et de Nanotechnologie, Route de Nozay, 91460 Marcoussis, France

4. Angewandte Festkörperphysik, Ruhr-Universität Bochum, Universitätsstr. 150, D-44780 Bochum, Germany

5. Fakultät für Physik/DELTA, Technische Universität Dortmund, Otto-Hahn-Str. 4, 44227 Dortmund, Germany

Publisher

AIP Publishing

Subject

General Physics and Astronomy

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