Thermodynamic modeling of BC x N y chemical vapor deposition from mixtures of N-trimethylborazine and nitrogen-Reference-Cited by-同舟云学术

Thermodynamic modeling of BC x N y chemical vapor deposition from mixtures of N-trimethylborazine and nitrogen

Published:2009-12 Issue:12 Volume:45 Page:1342-1345
ISSN:0020-1685
Container-title:Inorganic Materials
language:en
Short-container-title:Inorg Mater

Author:

Golubenko A. N.,Kosinova M. L.,Sulyaeva V. S.,Rumyantsev Yu. M.,Fainer N. I.,Kuznetsov F. A.

Publisher

Pleiades Publishing Ltd

Subject

Materials Chemistry,Metals and Alloys,Inorganic Chemistry,General Chemical Engineering

Link

http://link.springer.com/content/pdf/10.1134/S0020168509120061.pdf

Reference15 articles.

1. Kawaguchi, M. and Bartlett, N., Syntheses, Structure, and Intercalation Chemistry of B/C/N Materials Based on the Graphite Network, Fluorine-Carbon and Fluoride-Carbon Materials, Nakajima, T., Ed., New York: Marcel Dekker, 1995, pp. 187–238.

2. Kosinova, M.L., Fainer, N.I., Rumyantsev, Yu.M., et al., LPCVD Boron Carbonitride Films from Triethylamine Borane, J. Phys. IV, 1999, vol. 9, pp. Pr8-915–Pr8-921.

3. Leavy, R.A., Mastromatteo, E., Grow, J.M., et al., Low Pressure Chemical Vapor Deposition of B-C-N-H Films from Triethylamine Borane Complex, J. Mater. Res., 1995, vol. 10, no. 2, pp. 320–327.

4. Kosinova, M.L., Rumyantsev, Yu.M., Golubenko, A.N., et al., Chemical Composition of Boron Carbonitride Films Grown by Plasma-Enhanced Chemical Vapor Deposition from Trimethylamineborane, Neorg. Mater., 2003, vol. 39, no. 4, pp. 447–455 [Inorg. Mater. (Engl. Transl.), vol. 39, no. 4, pp. 366–373].

5. Ahn, H., Alberts, L., Wohle, J., and Rie, K.-T., Transparent BCN Coatings by RF PACVD at Low Temperature Using Metallo-Organic Precursors, Surf. Coat. Technol., 2001, vols. 142–144, pp. 894–898.

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