Chemical bonds and elemental compositions of BCxNylayers produced by chemical vapor deposition with trimethylamine borane, triethylamine borane, or trimethylborazine-Reference-Cited by-同舟云学术

Chemical bonds and elemental compositions of BCxNylayers produced by chemical vapor deposition with trimethylamine borane, triethylamine borane, or trimethylborazine

Published:2012-03-07 Issue:4 Volume:41 Page:240-246
ISSN:0049-8246
Container-title:X-Ray Spectrometry
language:en
Short-container-title:X-Ray Spectrom.

Author:

Hoffmann Peter S.¹,Baake Olaf¹,Kosinova Marina L.²,Beckhoff Burkhard³,Klein Andreas¹,Pollakowski Beatrix³,Trunova Valentina A.²,Sulyaeva Veronika S.²,Kuznetsov Fedor A.²,Ensinger Wolfgang¹

Affiliation:

1. Department of Materials Science; Technische Universität Darmstadt; Petersenstr. 23; 64287; Darmstadt; Germany

2. Nikolaev Institute of Inorganic Chemistry; Siberian Branch of Russian Academy of Sciences; Acad. Lavrentyev Pr. 3; Novosibirsk; 630090; Russia

3. Physikalisch-Technische Bundesanstalt; Abbestr. 2-12; 10587; Berlin; Germany

Publisher

Wiley

Subject

Spectroscopy

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/xrs.2387/fullpdf

Reference30 articles.

1. Characterization of BCN films synthesized by radiofrequency plasma enhanced chemical vapor deposition