Silicon and phosphorus co-implantation into undoped and indium-doped GaAs substrates-Reference-Cited by-同舟云学术

Silicon and phosphorus co-implantation into undoped and indium-doped GaAs substrates

Published:1997-12 Issue:12 Volume:31 Page:1217-1220
ISSN:1063-7826
Container-title:Semiconductors
language:en
Short-container-title:Semiconductors

Author:

Dymova N. N.,Kunitsyn A. E.,Chaldyshev V. V.,Markov A. V.

Publisher

Pleiades Publishing Ltd

Subject

Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1134/1.1187296.pdf

Reference7 articles.

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3. M. G. Milvidskii, V. B. Osvenskii, S. S. Shifrin, J. Cryst. Growth 52, 396 (1981).

4. Yu. V. Biryulin, N. V. Ganina, M. G. Mil’vidskii, V. V. Chaldyshev, and Yu. V. Shmartsev, Fiz. Tekh. Poluprovodn. 17, 108 (1983) [Sov. Phys. Semicond. 17, 68 (1983)].

5. V. V. Chaldyshev, E. V. Astrova, A. A. Lebedev, I. A. Bobrovnikova, N. A. Chernov, O. M. Ivleva, L. G. Lavrentieva, I. V. Teterkina, and M. D. Vilisova, J. Cryst. Growth 146, 246 (1995).

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