1. Christie, D.J., Walde, H.V., and Ash, T.J., Proc. 48th Ann. Techn. Conf. Soc. Vacuum Coaters, Denver, USA, 2005, p. 39.
2. Tomasel, F., Carter, D., Walde, H., Gonzalez, J., McDonough, G., and Roche, G., Plasma Sources Sci. Technol., 2003, vol. 12, p. 139.
3. Carter, D., Walde, H., McDonough, G., and Roche, G., Proc. 45th Ann. Techn. Conf. Soc. Vacuum Coaters, Lake Buena Vista, USA, 2002, p. 570.
4. Nyderle, R., Winkler, T., and Labitzke, R., Proc. 46th Ann. Techn. Conf. Soc. Vacuum Coaters, San Francisco, USA, 2003, p. 491.
5. Rettich, T. and Anderson, L., Proc. 47th Ann. Techn. Conf. Soc. Vacuum Coaters, Dallas, 2004, p. 237.