Synthesis of silicon carbonitride dielectric films with improved optical and mechanical properties from tetramethyldisilazane-Reference-Cited by-同舟云学术

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Synthesis of silicon carbonitride dielectric films with improved optical and mechanical properties from tetramethyldisilazane

Published:2013-01 Issue:1 Volume:39 Page:77-88
ISSN:1087-6596
Container-title:Glass Physics and Chemistry
language:en
Short-container-title:Glass Phys Chem

Author:

Fainer N. I.,Golubenko A. N.,Rumyantsev Yu. M.,Kesler V. G.,Maximovskii E. A.,Ayupov B. M.,Kuznetsov F. A.

Publisher

Pleiades Publishing Ltd

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites

Link

http://link.springer.com/content/pdf/10.1134/S1087659613010057.pdf

Reference38 articles.

1. Thärigen, T., Lippold, G., Riede, V., Lorenz, M., Koivusaari, K.J., Lorenz, D., Mosch, S., Grau, P., Hesse, R., Streubel, P., and Szargan, R., Hard Amorphous CSixNy Thin Films Deposited by RF Nitrogen Plasma Assisted Pulsed Laser Ablation of Mixed Graphite/Si3N4-Targets, Thin Solid Films, 1999, vol. 348, nos. 1–2, pp. 103–113.

2. Cao, Z.X., Nanocrystalline Silicon Carbonitride Thin Films Prepared by Plasma Beam-Assisted Deposition, Thin Solid Films, 2001, vol. 401, nos. 1–2, pp. 94–101.

3. Vlček, J., Kormunda, M., Čízek J., Pêrina V., and Zemek, J., Influence of Nitrogen-Argon Gas Mixtures on Reactive Magnetron Sputtering of Hard Si-C-N Films, Surf. Coat. Technol., 2002, vol. 160, pp. 74–81.

4. Gao Peng, Xu Jun, Piao Yong, Ding Wanyu, Wang Dehe, Deng Xinlu, and Dong Chuang, Deposition of Silicon Carbon Nitride Thin Films by Microwave ECR Plasma Enhanced Unbalance Magnetron Sputtering, Surf. Coat. Technol., 2007, vol. 201, pp. 5298–5301.

5. Ma Shengli, Xu Bin, Wu Guizhi, Wang Yanfeng, Ma Fei, Ma Dayan, Xu Kewei, and Bell Tom, Microstructure and Mechanical Properties of SiCN Hard Films Deposited by an Arc Enhanced Magnetic Sputtering Hybrid System, Surf. Coat. Technol., 2008, vol. 202, pp. 5379–5382.

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