Hard silicon carbonitride thin‐film coatings by remote hydrogen plasma chemical vapor deposition using aminosilane and silazane precursors. 2: Physical, optical, and mechanical properties of deposited films
Author:
Affiliation:
1. Polymer Department Centre of Molecular and Macromolecular Studies, Polish Academy of Sciences Lodz Poland
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/ppap.202000241
Reference55 articles.
1. High power deposition and analytics of amorphous silicon carbide films
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4. Mechanical and fracture toughness studies of amorphous SiC–N hard coatings using nanoindentation
5. Hardness and stiffness of amorphous SiCxNy chemical vapor deposited coatings
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