SYNTHESIS OF MAGNETIC NANOCOMPOSITE FILMS SiCxNyFez BY PLASMA-ENHANCED CHEMICAL DECOMPOSITION OF A GASEOUS MIXTURE OF 1,1,1,3,3,3-HEXAMETHYLDISILAZANE, FERROCENE, AND HELIUM-Reference-Cited by-同舟云学术

SYNTHESIS OF MAGNETIC NANOCOMPOSITE FILMS SiCxNyFez BY PLASMA-ENHANCED CHEMICAL DECOMPOSITION OF A GASEOUS MIXTURE OF 1,1,1,3,3,3-HEXAMETHYLDISILAZANE, FERROCENE, AND HELIUM

Published:2020-12 Issue:12 Volume:61 Page:1865-1875
ISSN:0022-4766
Container-title:Journal of Structural Chemistry
language:en
Short-container-title:J Struct Chem

Author:

Fainer N. I.,Plekhanov A. G.,Pushkarev R. V.,Shayapov V. R.,Maksimovskiy E. A.,Nadolinny V. A.,Korotaev E. V.,Kaichev V. V.

Publisher

Pleiades Publishing Ltd

Subject

Materials Chemistry,Inorganic Chemistry,Physical and Theoretical Chemistry

Link

http://link.springer.com/content/pdf/10.1134/S0022476620120045.pdf

Reference30 articles.

1. V. Sverdlov and S. Selberherr. Phys. Rep., 2015, 585, 1–40.

2. J. Huran, A. Valovič, M. Kučera, A. Kleinová, E. Kováčová, P. Boháček, and M. Sekáčová. J. Electr. Eng., 2012, 63(5), 333–335.

3. N. I. Fainer, M. L. Kosinova, Y. M. Rumyantsev, E. A. Maximovskii, and F. A. Kuznetsov. J. Phys. Chem. Solids, 2008, 69(2–3), 661–668.

4. R. V. Pushkarev, N. I. Fainer, and K. K. Maurya. Superlattices Microstruct., 2017, 102, 119–126.

5. R. V. Pushkarev, N. I. Fainer, A. N. Golubenko, Y. M. Rumyantsev, V. A. Nadolinnyi, E. A. Maksimovskii, E. V. Korotaev, and V. V. Kaichev. Glass Phys. Chem., 2016, 42(5), 649–657.

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Review of EPR and Magnetization Investigations of Doped Nanoparticles of Transition Metal Oxides and SiCN: Functional Materials and Spintronic Devices;Applied Magnetic Resonance;2024-03-30

2. SiCNFe Ceramics as Soft Magnetic Material for MEMS Magnetic Devices: A Mössbauer Study;Micromachines;2023-04-25

3. Composition, structure, and magnetic properties of SiCxNyFez films produced by the PECVD method from a gas mixture of 1,1,1,3,3,3-hexamethyldisilazane, ferrocene, and helium;Colloids and Surfaces A: Physicochemical and Engineering Aspects;2022-12