Synthesis of Si–C–N–Fe films from volatile organosilicon substances-precursors and ferrocene. Part II. Properties of SiC x N y Fe z films obtained by thermal decomposition of tris(diethylamino)silane and ferrocene
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Published:2016-09
Issue:5
Volume:42
Page:490-496
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ISSN:1087-6596
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Container-title:Glass Physics and Chemistry
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language:en
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Short-container-title:Glass Phys Chem
Author:
Pushkarev R. V.,Fainer N. I.,Golubenko A. N.,Rumyantsev Yu. M.,Nadolinnyi V. A.,Maksimovskii E. A.,Korotaev E. V.,Kaichev V. V.
Publisher
Pleiades Publishing Ltd
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites
Reference17 articles.
1. Fainer, N.I., Pushkarev, R.V., Golubenko, A.N., Rumyantsev, Yu.M, Maksimovskii, E.A., and Kaichev, V.V., Synthesis of Si–C–N–Fe layers from volatile organosilicon precursors and ferrocene. Part I. Synthesis, chemical and phase composition of iron-containing layers prepared by thermal decomposition of ferrocene, Glass Phys. Chem., 2015, vol. 41, no. 6, pp. 853–862. 2. Fainer, N.I., Golubenko, A.N., Rumyantsev, Yu.M., and Maksimovskii, E.A., Use of hexamethylcyclotrisilazane for preparation of transparent films of complex compositions, Glass Phys. Chem., 2009, vol. 35, no. 3, pp. 274–283. 3. Fainer, N.I., Maximovskii, E.A., Rumyantsev, Yu.M., Kosinova, M.L., and Kuznetsov, F.A., Study of structure and phase composition of nanocrystal silicon carbonitride films, NIMA, 2001, vol. 470, no. 1, pp. 193–197. 4. Oliver, W.C. and Pharr, G.M., An improved technique for determining hardness and elastic module using load and displacement sensing indentation experiments, J. Mater. Res., 1992, vol. 7, pp. 1564–1583. 5. Ferrari, A.C. and Robertson, J., Interpretation of Raman spectra of disordered and amorphous carbon, Phys. Rev. B, 2000, vol. 61, no. 20, pp. 14095–14107.
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